ASTM F1709-97(2016)
Standard Specification for High Purity Titanium Sputtering Targets for Electronic Thin Film Applications (Withdrawn 2023)
ASTM International , 05/01/2016
$33.00
$66.00
1.1This specification covers pure titanium sputtering targets used as a raw material in fabricating semiconductor electronic devices.
1.2This standard sets purity grade levels, physical attributes, analytical methods, and packaging.
1.2.1The grade designation is a measure of total metallic impurity content. The grade designation does not necessarily indicate suitability for a particular application because factors other than total metallic impurity may influence performance.
Product Information
Published:
05/01/2016
Pages:
3
File Size:
1 file , 66 KB
Language:
English
Note:
This product is unavailable in Russia, Ukraine, Belarus
ASTM F1709-97(2016)
$33.00
ASTM F1709-97(2008)
$25.00
