IEC 62047-1 Ed. 1.0 b:2005

Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions

International Electrotechnical Commission , 09/27/2005

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This part of IEC 62047 defines terms for micro-electromechanical devices including the process of production of such devices.

Product Information

Published: 09/27/2005
Pages: 49
File Size: 1 file , 690 KB
Language: English, French
Note: This product is unavailable in Ukraine, Russia, Belarus
IEC 62047-1 Ed. 2.0 b:2016
IEC 62047-1 Ed. 1.0 b:2005

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