BS PD ISO/TS 25138:2019

This document describes a glow-discharge optical-emission spectrometric method for the determination of the thickness, mass per unit area and chemical composition of metal oxide films.

This method is applicable to oxide films 1 nm to 10 000 nm thick on metals. The metallic elements ofthe oxide can include one or more from Fe, Cr, Ni, Cu, Ti, Si, Mo, Zn, Mg, Mn, Zr and Al. Other elementsthat can be determined by the method are O, C, N, H, P and S.Cross References:ISO 14707ISO 14284ISO 16962:2017ISO 5725-2ISO 5725-1ISO 5725-6ISO 9000:2015ISO/IEC 17025:2017