This document defines terms related to nanomanufacturing processes in the field of nanotechnologies.

All the process terms in this document are relevant to nanomanufacturing, however, many of the listedprocesses are not exclusively relevant to the nanoscale. Terms that are not exclusive are noted withinthe definitions. Depending on controllable conditions, such processes can result in material features atthe nanoscale or, alternatively, at larger scales.

There are many other terms that name tools, components, materials, systems control methods ormetrology methods associated with nanomanufacturing that are beyond the scope of this document.