1.1This guide covers specimen handling and preparation prior to surface analysis and applies to the following surface analysis disciplines:

1.1.1Auger electron spectroscopy (AES),

1.1.2X-ray photoelectron spectroscopy (XPS or ESCA), and

1.1.3Secondary ion mass spectrometry (SIMS).

1.1.4Although primarily written for AES, XPS, and SIMS, these methods may also apply to many surface-sensitive analysis methods, such as ion scattering spectrometry, low-energy electron diffraction, and electron energy loss spectroscopy, where specimen handling can influence surface-sensitive measurements.

1.2This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.