1.1This test method covers measurement of the local thickness of metal and oxide coatings by the microscopical examination of cross sections using an optical microscope.

1.2Under good conditions, when using an optical microscope, the method is capable of giving an absolute measuring accuracy of 0.8 μm. This will determine the suitability of the method for measuring the thickness of thin coatings.

1.3This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. (This is especially applicable to the chemicals cited in Table X2.1.)