BS PD IEC TR 63258:2021
Nanotechnologies. A guideline for ellipsometry application to evaluate the thickness of nanoscale films
BSI Group , 03/25/2021
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This document, which is a Technical Report, is focused on the practical protocol of ellipsometryto evaluate the thickness of nanoscale films. This document does not include any specificationof the ellipsometers, but suggests how to minimize the data variation to improve datareproducibility.
Product Information
Published:
03/25/2021
Pages:
24
ISBN:
9780539057102
File Size:
1 file , 1.1 MB
Language:
English
Note:
This product is unavailable in Ukraine, Russia, Belarus
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