AS ISO 14606-2006

Surface chemical analysis - Sputter depth profiling - Optimization using layered systems as reference materials

Standards Australia , 10/20/2006

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Adopts ISO 14606:2000 to give guidance on the optimization of sputter depth profiling parameters using appropriate single-layered and multi-layered reference materials in order to achieve optimum depth resolution as a function of instrument settings.

Product Information

Published: 10/20/2006
Pages: 15
ISBN: 0733777953
File Size: 1 file , 690 KB
Language: English
Note: This product is unavailable in Ukraine, Russia, Belarus

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