AS ISO 14237-2006
Surface chemical analysis - Secondary-ion mass spectrometry - Determination of boron atomic concentration in silicon using uniformly doped materials
Standards Australia , 10/20/2006
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Adopts ISO 14237:2000 to specify a secondary-ion mass spectrometric method for the determination of boron atomic concentration in single-crystalline silicon, using uniformly doped materials calibrated by a certified reference material implanted with boron.
Product Information
Published:
10/20/2006
Pages:
22
ISBN:
0733777929
File Size:
1 file , 690 KB
Language:
English
Note:
This product is unavailable in Ukraine, Russia, Belarus
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